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In cutting-edge fields such as chip manufacturing and optical fiber preform synthesis, the purity of materials directly determines the performance limits of products. IOTA High-Purity Silicon Tetrachloride (TET), with its ≥99.9999% ultra-high purity and ≥500 Ω·cm resistivity performance, provides safe, reliable, and consistent high-quality raw material assurance for critical processes such as semiconductor deposition and optical fiber core layer preparation.
Ultimate Purity, Reliable Performance
Purity ≥99.9999% (6N grade), meeting stringent requirements for impurity control in advanced processes
Extremely low levels of key impurities: B ≤ 0.1 ppb, As/P ≤ 0.08 ppb, C < 0.2 ppb
Resistivity ≥500 Ω·cm, ensuring consistency in the electrical properties of deposited films
Strict Control of Metal Impurities
Transition metal impurities such as Fe, Ni, and Cr are controlled at ppb levels
Effectively reduces lattice defects, improving device yield and reliability
Professional Packaging, Safe Delivery
Uses high-purity 316L stainless steel containers to prevent secondary contamination
Available in 45L, 250L, and 900L specifications, corresponding to fill weights of 45kg, 300kg, and 1000kg
Standard valves include 1/2" and 1/4" VCR interfaces, compatible with mainstream delivery systems. Custom packaging and interface solutions are available upon request
| Parameter | Specification |
|---|---|
| Purity | ≥99.9999% |
| Resistivity | ≥500 Ω·cm |
| Other Chlorosilanes | <1 ppm |
| Boron (B) | ≤0.1 ppb |
| Arsenic/Phosphorus (As/P) | ≤0.08 ppb |
| Carbon (C) | <0.2 ppb |
| Iron (Fe) | <2 ppb |
| Nickel (Ni) | ≤2 ppb |
| Chromium (Cr) | ≤1 ppb |
Semiconductor Manufacturing
Silicon source for epitaxial deposition (Epitaxy)
Precursor for chemical vapor deposition (CVD)
Raw material for high-purity polysilicon production
Optical Fiber Communications
Synthesis of optical fiber preform core layers
Production of doped quartz glass
Specialty Material Synthesis
Vapor deposition of high-purity silicon dioxide
Synthesis of specialty ceramics and precursors
Supporting materials for photovoltaics and electronic specialty gases
Container Material: 316L stainless steel, electrolytically polished (EP grade) inner surface, ultra-high cleanliness
Specification Options:
45L cylinder → filled with 45kg
250L cylinder → filled with 300kg
900L cylinder → filled with 1000kg
Valve Configuration: 1/2" and 1/4" VCR interfaces, compatible with helium mass spectrometry leak detection
Custom Services: Tailored packaging, valve, and delivery solutions available based on process requirements